been well solved. Yamata et al.'s research has shown that the main cause of noise in rolling linear guide pairs is the collision between the rolling elements, end caps, and raceways. For sound pressure levels in the range of 100-20000 Hz, it can be reduced by installing lighter ceramic balls (Si5 N4). Through actual measurement, when the motion speed is within the range of 0.3~1.17m/s, the noise of the steel ball rolling element is 60.0~76.9dB, while the noise of the ceramic steel ball is 55~71dB, with an average noise reduction of 4.5 dB.
2. In the face of the requirements for green environmental protection, semiconductor and LCD manufacturing equipment have extremely high demands for green environments. In such environments, vacuum fluorine lubricants are used for rolling linear guide pairs because the amount of fluorine lubricant dust generated is extremely low. However, the durability and rust prevention ability of fluorine based lubricants are not high, and the resistance increases during high-speed operation. Due to these reasons, the use of low dust lubricants and sealing lubricants composed of KI series can achieve the same characteristics as vacuum lubricants. In order to meet the requirements of green environmental protection and various usage requirements, it is very important to improve the anti rust ability. For example, stainless steel guide rail pairs are made of martensitic stainless steel materials and have the same rated load and other functions as general standard guide rail pairs. The surface treatment of the guide rail pair is necessary to prevent rust and light reflection. From the aspects of rust prevention function, durability, and cost, it is recommended to use the electrolytic rust prevention black film surface treatment technology with black chromium plating. It is also possible to apply a layer of fluorine resin coating using fluoride low-temperature spraying method to further improve the rust prevention performance, which can be widely used in medicine and food machinery. In order to meet the interchangeability requirements, it is necessary to first accurately process and measure the groove position dimensions, improve the machining accuracy of the guide rail and slider, and strengthen the inventory management of semi-finished products and establish a complete computer management system.